TY  - BOOK
AU  - Shimura,Fumio
TI  - Semiconductor silicon crystal technology / 
SN  - 0126400458 (alk. paper)
AV  - TK7871.85 .S523 1988
U1  - 621.38152/ S556s 23
PY  - 1989///
CY  - New York
PB  - Academic Press
KW  - Semiconductors
KW  - Silicon crystals
N1  - Includes bibliographical references and index; EEE, ETE, TE
ER  -